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| Place of Origin: | China |
| Brand Name: | PAM-XIAMEN |
| Minimum Order Quantity: | 1-10,000pcs |
|---|---|
| Price: | By Case |
| Delivery Time: | 5-50 working days |
| Payment Terms: | T/T |
| Supply Ability: | 10,000 wafers/month |
| Product Name: | 3 Inch Silicon Wafer | Feature: | Prime Grade |
|---|---|---|---|
| Dopant: | P/As/Sb | Wafer Thickness: | Power Way |
| Other Name: | Phosphorus Doped Orientation 111 Wafer | Wafer Diameter: | 3 Inch |
| High Light: | cz silicon wafer,epitaxial silicon wafer |
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3 Inch Silicon Wafer FZ N Type Phosphorus Doped Orientation 111 Prime Grade 3"
3inch Silicon Wafer FZ N Type Phosphorus Doped Orientation 111 Prime Grade 3"
| Type | Conduction Type | Orientation | Diameter(mm) | Resistivity(Ω•cm) |
| High resistance | N&P | <100>&<111> | 50 - 300 | >1000 |
| NTD | N | <100>&<111> | 50 - 300 | 30-800 |
| CFZ | N&P | <100>&<111> | 50 - 300 | 1-50 |
| GD | N&P | <100>&<111> | 50 - 300 | 0.001-300 |
| Parameter | Unit | Value |
| Crystalline structure | - | Monocrystalline |
| Growth technique | - | FZ |
| Crystal Orientation | - | 111 |
| Conductance type | - | N |
| Dopant | - | P/As/Sb |
| Diameter | mm | 76.2 |
| Resistivity | Ω/cm2 | >1000, 30-800, 1-50, 0.001-300 |
| Thickness | um | 350±15um 230±15um 380±25um |
| TTV | um | ≤10 um |
| BOW | um | ≤40 um |
| Warp | um | ≤40 um |
| (G)STIR | um | Customer standard |
| Site Flatness-STIR | um | Customer standard |
| Edge Exclusion Zone | mm | SEMI STD or Customer Request |
| LPD's | - | ≥0.3μm, <30count or Customer Request |
| Oxygen Concentration | ppma | <1E16/cc |
| Carbon Concentration | ppma | <1E16/cc |
| RRG | - | ≤15% |
| Front Surface | - | Polished |
| Back Surface | - | Polished or Etched |
| Edge Surface Condition | SEMI STD or Customer Request | |
| Primary Flat Length | mm | SEMI STD |
| Primary Flat Orientation(100/111) & Angle(°) | SEMI STD | |
| Secondary Flat Length | mm | SEMI STD |
| Secondary Flat Orientation(100/111) & Angle(°) | SEMI STD | |
| Laser mark | - | SEMI STD or Customer Request |
| Packaging | Packaged in a class 100 clean room environment, Heat-sealed plastic inner/aluminium foil outer bags, Vacuum Packing | |
| If specific requirement by customer, will adjust accordingly | ||
Found in 1990,Xiamen Powerway Advanced Material Co., Ltd (PAM-XIAMEN) is a leading manufacturer of semicon doctor semiconductor material in China. PAM-XIAMEN develops advanced crystal growth and epitaxy technologies, manufacturing processes, engineered substrates and semiconductor devices. PAM-XIAMEN’s technologies enable higher performance and lower cost manufacturing of semiconductor wafer. For almost 30 years, PAM-XIAMEN aims to manufacture monocrystalline silicon wafer from the pulling process to get the ingot up to the final step which is the cleaning process, and vertically integrating to epi growth(silicon epi wafer) . This production and epi growth flow allows to maintain a reliable and qualitative consistency. Welcome you to enquire our engineer team, and we will give you full technology support.
Polishing: Most prime grade silicon wafers go through 2-3 stages of polishing, using progressively finer slurries or polishing compounds. The polishing process occurs in two steps, which are stock removal and final chemical mechanical polish (CMP). Both processes use polishing pads and polishing slurry. The stock removal process removes a very thin layer of silicon and is necessary to produce a wafer surface that is damage-free. After polishing, the silicon wafers proceed to a final cleaning stage that uses a long series of clean baths. This process removes surface particles, trace metals, and residues. Oftentimes a backside scrub is done to remove even the smallest particles.
Packaging:Once the wafers complete the final cleaning step, engineers sort them by specification and inspect them under high intensity lights or laser-scanning systems. This detects unwanted particles or other defects that may have occurred during fabrication. All wafers that meet the proper specifications are packaged in cassettes and sealed with tape. The wafers ship in a vacuum-sealed plastic bag with an airtight foil outer bag. This ensures that no particles or moisture enters the cassette upon leaving the clean room.
About Us
Responsibility is the assurance of quality, and quality is the life of corporation. We are looking forward to long term cooperation with customers, we will make best service and after sales service for all of our customers. If you have any inquiry, please don’t hesitate to contact us. We will reply you at the first time as we can.
After years of development, we have established perfect sales network and integrated after-sale service system at domestic and abroad, which enables the company to provide timely, accurate and efficient services, and won good customer reputations. The products are sold all over in China and exported to more than 30 countries and regions such as Europe, America, Southeast Asia, South America, Middle East and Africa. The production, sales volume and scale are all ranked first in the same industry.
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